Angular spectrum tailoring in solid immersion microscopy for circuit analysis
S. B. Ippolito, P. Song, D. L. Miles, and J. D. Sylvestri
We present a technique that involves tailoring the angular spectrum in optical microscopy of silicon integrated circuits, with a solid immersion lens. Spatial light modulation to select only supercritical light at the substrate/dielectric interface yields only evanescent and scattered light in the i ... [Appl. Phys. Lett. 92, 101109 (2008)] published Tue Mar 11, 2008.
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We present a technique that involves tailoring the angular spectrum in optical microscopy of silicon integrated circuits, with a solid immersion lens. Spatial light modulation to select only supercritical light at the substrate/dielectric interface yields only evanescent and scattered light in the i ... [Appl. Phys. Lett. 92, 101109 (2008)] published Tue Mar 11, 2008.
Read full Article »
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