Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope
Masatsugu Yamashita, Chiko Otani, Kodo Kawase, Toru Matsumoto, Kiyoshi Nikawa et al.
We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 [mu]m wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emis ... [Appl. Phys. Lett. 94, 191104 (2009)] published Wed May 13, 2009.
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We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 [mu]m wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emis ... [Appl. Phys. Lett. 94, 191104 (2009)] published Wed May 13, 2009.
Read full Article »
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