Broadband moth-eye antireflection coatings on silicon

Chih-Hung Sun, Peng Jiang, and Bin Jiang
We report a bioinspired templating technique for fabricating broadband antireflection coatings that mimic antireflective moth eyes. Wafer-scale, subwavelength-structured nipple arrays are directly patterned on silicon using spin-coated silica colloidal monolayers as etching masks. The templated grat ... [Appl. Phys. Lett. 92, 061112 (2008)] published Thu Feb 14, 2008.
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