Vacuum UV applications for nanoscale processing
Vacuum-UV radiation is useful for surface microanalysis and has enabled development of a new, high-quality chemical vapor-deposition technique operating near room temperature.
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- Most popular SPIE Newsroom articles and Digital Library papers from last month.
- Most popular SPIE Newsroom articles and Digital Library papers from last month.
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- Modeling extreme nanoscale devices
- Modeling extreme nanoscale devices
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- Simulation method improves accuracy for optical metrology and nanooptics design
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- Maskless multibeam laser irradiation enables large-area nanostructure fabrication
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- Surface microstructuring by laser-induced backside wet etching
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- Advances in extreme-UV lithography
- Advances in extreme-UV lithography
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- Overcoming mask blank defects in EUV lithography
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- Patterned media could enable next-generation hard-disk drives
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- Using nanomachining to repair photomasks for the 32nm node and beyond
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