Effect of pressure on the properties of phosphorus-doped p-type ZnO thin films grown by radio frequency-magnetron sputtering
Dae-Kue Hwang, Min-Suk Oh, Yong-Seok Choi, and Seong-Ju Park
We report the effect of pressure on the surface morphology, electrical and optical properties of phosphorus (P)-doped p-type ZnO grown by radio frequency magnetron sputtering. The nanorod structures of P-doped ZnO films became dense and flat with decreasing pressure. The Hall effect measurement of t ... [Appl. Phys. Lett. 92, 161109 (2008)] published Tue Apr 22, 2008.
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We report the effect of pressure on the surface morphology, electrical and optical properties of phosphorus (P)-doped p-type ZnO grown by radio frequency magnetron sputtering. The nanorod structures of P-doped ZnO films became dense and flat with decreasing pressure. The Hall effect measurement of t ... [Appl. Phys. Lett. 92, 161109 (2008)] published Tue Apr 22, 2008.
Read full Article »
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