Emission properties of high-Q silicon nitride photonic crystal heterostructure cavities

Michael Barth, Nils Nusse, Johannes Stingl, Bernd Lochel, and Oliver Benson
We report on the fabrication and optical characterization of photonic crystal (PC) double-heterostructure cavities made from silicon nitride (SiN). The intrinsic luminescence of the SiN membranes was used as an internal light source in the visible wavelength range (600700 nm) to study the quality f ... [Appl. Phys. Lett. 93, 021112 (2008)] published Tue Jul 15, 2008.
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