Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals
Maria Makarova, Vanessa Sih, Joe Warga, Rui Li, Luca Dal Negro et al.
Photonic crystal nanocavities are fabricated in silicon membranes covered by thermally annealed silicon-rich nitride films with Erbium-doped silicon nanocrystals. Silicon nitride films were deposited by sputtering on top of silicon on insulator wafers. The nanocavities were carefully designed in ord ... [Appl. Phys. Lett. 92, 161107 (2008)] published Tue Apr 22, 2008.
Read full Article »
Photonic crystal nanocavities are fabricated in silicon membranes covered by thermally annealed silicon-rich nitride films with Erbium-doped silicon nanocrystals. Silicon nitride films were deposited by sputtering on top of silicon on insulator wafers. The nanocavities were carefully designed in ord ... [Appl. Phys. Lett. 92, 161107 (2008)] published Tue Apr 22, 2008.
Read full Article »
Leave a Reply