Extreme UV lithography may be used with double patterning
Memory chip and other high-volume component makers will likely use extreme ultraviolet lithography alongside double patterning.
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admin February 5th, 2009 Micro - Nano Fabrication
Double patterning lithography: double the trouble or double the fun?
Advances in extreme-UV lithography
Advances in extreme-UV lithography
Double-patterning-compliant split and design
Effects of laser pulse duration on extreme ultraviolet spectra from double optical gating
Challenges and solutions for extreme ultraviolet lithography at 22nm
Watching solar activity muddle Earth’s magnetic field
Algorithm variability in optical lithography
Low-cost laser patterning process for flat panel displays
Maskless lithography: photons rather than electrons
Two-photon patterning of a polymer containing Y-shaped azochromophores
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