Fabrication and characterization of three-dimensional all metallic photonic crystals for near infrared applications
Yu-Lin Yang, Fu-Ju Hou, Shich-Chuan Wu, Wen-Hsien Huang, Ming-Chih Lai et al.
Three-dimensional all metallic photonic crystals with a feature size of 0.20 [mu]m were fabricated using electron-beam lithography with the photoresist of hydrogen silesquioxane. This process method has high compatibility with the fabrication of damascene copper interconnections and also simplifies ... [Appl. Phys. Lett. 94, 041122 (2009)] published Thu Jan 29, 2009.
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Three-dimensional all metallic photonic crystals with a feature size of 0.20 [mu]m were fabricated using electron-beam lithography with the photoresist of hydrogen silesquioxane. This process method has high compatibility with the fabrication of damascene copper interconnections and also simplifies ... [Appl. Phys. Lett. 94, 041122 (2009)] published Thu Jan 29, 2009.
Read full Article »
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