High-efficiency, large-bandwidth silicon-on-insulator grating coupler based on a fully-etched photonic crystal structure

Liu Liu (刘柳), Minhao Pu (蒲敏皓), Kresten Yvind, and Jorn M. Hvam
A grating coupler for interfacing between single-mode fibers and photonic circuits on silicon-on-insulator is demonstrated. It consists of columns of fully etched photonic crystal holes, which are made in the same lithography and etching processes used for making the silicon-on-insulator wire wavegu ... [Appl. Phys. Lett. 96, 051126 (2010)] published Fri Feb 5, 2010.
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