In-plane microelectromechanical resonator with integrated Fabry–P[e-acute]rot cavity
Marcel W. Pruessner, Todd H. Stievater, and William S. Rabinovich
A silicon-on-insulator in-plane microelectromechanical resonator coupled to a high-Q (Q[approximate]4,200), high finesse (F=265) optical FabryPerot microcavity is presented. The cavity utilizes high reflectance dry-etched silicon/air distributed Bragg reflectors. By suspending one of the Bragg mirro ... [Appl. Phys. Lett. 92, 081101 (2008)] published Mon Feb 25, 2008.
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A silicon-on-insulator in-plane microelectromechanical resonator coupled to a high-Q (Q[approximate]4,200), high finesse (F=265) optical FabryPerot microcavity is presented. The cavity utilizes high reflectance dry-etched silicon/air distributed Bragg reflectors. By suspending one of the Bragg mirro ... [Appl. Phys. Lett. 92, 081101 (2008)] published Mon Feb 25, 2008.
Read full Article »
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