Method to measure spatial coherence of subangstrom electron beams
Christian Dwyer, Rolf Erni, and Joanne Etheridge
A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C-corrected 300 kV field emission gun TEM/STEM, which is found to have an effect ... [Appl. Phys. Lett. 93, 021115 (2008)] published Wed Jul 16, 2008.
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A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C-corrected 300 kV field emission gun TEM/STEM, which is found to have an effect ... [Appl. Phys. Lett. 93, 021115 (2008)] published Wed Jul 16, 2008.
Read full Article »
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