Monocrystalline Al[sub x]Ga[sub 1 - x]As heterostructures for high-reflectivity high-Q micromechanical resonators in the megahertz regime
Garrett D. Cole, Simon Groblacher, Katharina Gugler, Sylvain Gigan, and Markus Aspelmeyer
We present high-performance megahertz micromechanical oscillators based on freestanding epitaxial AlGaAs distributed Bragg reflectors. Compared with dielectric reflectors, the low mechanical loss of the monocrystalline heterostructure gives rise to significant improvements in the achievable mechanic ... [Appl. Phys. Lett. 92, 261108 (2008)] published Tue Jul 1, 2008.
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We present high-performance megahertz micromechanical oscillators based on freestanding epitaxial AlGaAs distributed Bragg reflectors. Compared with dielectric reflectors, the low mechanical loss of the monocrystalline heterostructure gives rise to significant improvements in the achievable mechanic ... [Appl. Phys. Lett. 92, 261108 (2008)] published Tue Jul 1, 2008.
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