Nanofabrication of diffractive elements for soft x-ray and extreme ultraviolet applications using ion beam lithography
Johannes Lenz, Thomas Wilhein, and Stephan Irsen
In the soft x-ray (SXR) and extreme ultraviolet (EUV) spectral region, optical elements are mainly based on diffractive structures. We report on experiments showing the fabrication of such elements using ion beam lithography. This allows single-step milling of freestanding transmission as well as re ... [Appl. Phys. Lett. 95, 191118 (2009)] published Fri Nov 13, 2009.
Read full Article »
In the soft x-ray (SXR) and extreme ultraviolet (EUV) spectral region, optical elements are mainly based on diffractive structures. We report on experiments showing the fabrication of such elements using ion beam lithography. This allows single-step milling of freestanding transmission as well as re ... [Appl. Phys. Lett. 95, 191118 (2009)] published Fri Nov 13, 2009.
Read full Article »
Leave a Reply