Nanoscale three dimensional pattern formation in light emitting porous silicon
Ik Su Chun, Edmond K. Chow, and Xiuling Li
A simple and efficient method for generating light emitting three-dimensional (3D) nanoscale pattern in silicon is presented. The method is based on differential chemical etching on and in-between patterned metal features. Effective transfer of various two-dimensional nanoscale (10100 nm) metal pat ... [Appl. Phys. Lett. 92, 191113 (2008)] published Fri May 16, 2008.
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A simple and efficient method for generating light emitting three-dimensional (3D) nanoscale pattern in silicon is presented. The method is based on differential chemical etching on and in-between patterned metal features. Effective transfer of various two-dimensional nanoscale (10100 nm) metal pat ... [Appl. Phys. Lett. 92, 191113 (2008)] published Fri May 16, 2008.
Read full Article »
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