Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope
Masatsugu Yamashita, Chiko Otani, Kodo Kawase, Kiyoshi Nikawa, and Masayoshi Tonouchi
We have proposed and demonstrated a novel technique for the noncontact inspection of electrical failures in semiconductor devices using a laser terahertz emission microscope. It was found that the waveforms of the terahertz pulses, emitted by exciting p-n junctions in semiconductor circuits with foc ... [Appl. Phys. Lett. 93, 041117 (2008)] published Thu Jul 31, 2008.
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We have proposed and demonstrated a novel technique for the noncontact inspection of electrical failures in semiconductor devices using a laser terahertz emission microscope. It was found that the waveforms of the terahertz pulses, emitted by exciting p-n junctions in semiconductor circuits with foc ... [Appl. Phys. Lett. 93, 041117 (2008)] published Thu Jul 31, 2008.
Read full Article »
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