Sensitized erbium emission from silicon-rich nitride/silicon superlattice structures
L. Dal Negro, R. Li, J. Warga, and S. N. Basu
Erbium-doped silicon-rich nitride/silicon superlattice structures were fabricated by direct magnetron cosputtering deposition on Si substrates. Rapid thermal annealing resulted in the nucleation of small amorphous Si clusters, which efficiently sensitize 1.54 [mu]m emission via a nanosecond-fast no ... [Appl. Phys. Lett. 92, 181105 (2008)] published Wed May 7, 2008.
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Erbium-doped silicon-rich nitride/silicon superlattice structures were fabricated by direct magnetron cosputtering deposition on Si substrates. Rapid thermal annealing resulted in the nucleation of small amorphous Si clusters, which efficiently sensitize 1.54 [mu]m emission via a nanosecond-fast no ... [Appl. Phys. Lett. 92, 181105 (2008)] published Wed May 7, 2008.
Read full Article »
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