Submicron silicon waveguide optical switch driven by microelectromechanical actuator
Erdal Bulgan, Yoshiaki Kanamori, and Kazuhiro Hane
A submicron silicon waveguide optical switch driven by a microelectromechanical actuator is fabricated. The switch is composed of single-mode silicon input and output waveguides and a movable waveguide suspended by silicon springs. Switching occurs when the air gap between input and output waveguide ... [Appl. Phys. Lett. 92, 101110 (2008)] published Tue Mar 11, 2008.
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A submicron silicon waveguide optical switch driven by a microelectromechanical actuator is fabricated. The switch is composed of single-mode silicon input and output waveguides and a movable waveguide suspended by silicon springs. Switching occurs when the air gap between input and output waveguide ... [Appl. Phys. Lett. 92, 101110 (2008)] published Tue Mar 11, 2008.
Read full Article »
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