Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography
D. Shir, E. C. Nelson, Y. C. Chen, A. Brzezinski, H. Liao et al.
We describe the fabrication of silicon three dimensional photonic crystals using polymer templates defined by a single step, two-photon exposure through a layer of photopolymer with relief molded on its surface. The resulting crystals exhibit high structural quality over large areas, displaying geom ... [Appl. Phys. Lett. 94, 011101 (2009)] published Mon Jan 5, 2009.
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We describe the fabrication of silicon three dimensional photonic crystals using polymer templates defined by a single step, two-photon exposure through a layer of photopolymer with relief molded on its surface. The resulting crystals exhibit high structural quality over large areas, displaying geom ... [Appl. Phys. Lett. 94, 011101 (2009)] published Mon Jan 5, 2009.
Read full Article »
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